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P02900 - SEMI P29 - 減衰型位相シフトマスク(ハーフトーン型位相シフトマスク)およびマスクブランクスに特有な特性の仕様 Revision:SEMI P29-1105 - Superseded where applicable

SKU: 42262155461
4.0

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Description

where applicable

4  The Guide focuses on general measurement techniques including infrared (IR) laser profiling

and bricks with carrier recombination lifetime in the range of 0

org in June 2010

Bulk distribution systems that dispense to other smaller systems not specified above

P02900 - SEMI P29 - 減衰型位相シフトマスク(ハーフトーン型位相シフトマスク)およびマスクブランクスに特有な特性の仕様 Revision:SEMI P29-1105 - Superseded where applicableglobal Micropatterning Committee200598global Audits and Reviews Subcommittee200510www. semi. org200511CD ROM19979 2005 Referenced SEMI Standards SEMI P1 Specification for Hard Surface Photomask Substrates SEMI P22 Guideline for Photomask Defect Classification and Size Definition

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