F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdPbc-0619 The specifications provided by this

The specifications provided by this Standard are intended to serve for gases to be used in the manufacture and processing of semiconductors and advanced electronic devices and circuits

Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37

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1-1296 (technical revision)

F06200 - SEMI F62 - Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects StdPbc-0619 The specifications provided by thisThis Standard defines a method for testing mass flow controllers (MFCs) being considered for installation into a gas distribution system and to quantify ambient and gas temperature effects on the MFCs indicated and actual flow. This Test Method applies to metal and polymer sealed MFCs. The tests include those listed below and are to be performed in the following order: 1. Ambient Temperature Effects (Steady State and Transient) 2. Gas Temperature