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notably for trace impurities
originally published in 1983
Please make sure that you have reviewed your order prior to finalizing your purchase
The International System of Units (SI) is used as the standard unit of measure in this Document
and wafer on wafer (WoW) to help accelerate the progress of 3DS-IC testing
C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdTpc-Process Chemicals - Miscellaneous notably for trace impuritiesNOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical
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