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and monitoring of UPW and hot ultrapure water (HUPW) systems
SEMI E83-0515 (technical revision)
• Parts such as a nut or gripper are not limited to being made of a fluorocarbon material
This Specification applies to all cerdip (dual-in-line) packages which have either:
It is an aqueous immersion method
M07600 - SEMI M76 - Specification for Developmental 450 mm Diameter Polished Single Crystal Silicon Wafers Revision:SEMI M76-0710 - Inactive and monitoring of UPW andThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high density integrated
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