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背景および動機
• Exhaust and other process effluents
SEMI C36-0705 (technical revision)
5 m to 5 m
10-0600 (Reapproved 1017)
C01900 - SEMI C19 - Specification for Acetone StdTpc-Automation Technology 背景および動機NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically
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