P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 SEMI E5-1103 (technical revision)

SEMI E5-1103 (technical revision)

Flow Curve

either a single surface (front or back) or thickness

本スタンダードでは，フレキシブルディスプレイ用のプラスチック基板に関する各用語について定義しそれを解釈することでフレキシブルディスプレイの製造において利用される材料・指標を提供するものとする。

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

P00500 - SEMI P5 - Specification for Pellicles StdPbc-0415 SEMI E5-1103 (technical revision)This Specification covers the general requirements for pellicles used on photomasks or reticles in photolithographic exposure systems. This Specification covers pellicles for use in either broadband, polychromatic or monochromatic exposure systems. Referenced SEMI Standards (purchase separately) None. Revision History SEMI P5 0416 (Reapproved 1221) SEMI P5 0416 (technical revision) SEMI P5 0704 (technical revision) SEMI P5 94 (Reapproved 1103) SEMI P5