M05400 - SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters Revision:SEMI M54-0304 - Superseded An EPD is a device

An EPD is a device that measures and monitors process characteristics to determine when a specific threshold or event has been obtained usually to signal the completion of a process or process step

Establishment of other related terminologies will follow

SEMI G82-0301E (Reapproved 0706)

SEMI E5-94 (technical revision)

This Standard is expected to:

M05400 - SEMI M54 - Guide for Semi-Insulating (SI) GaAs Material Parameters Revision:SEMI M54-0304 - Superseded An EPD is a device1 Purpose 1. 1 Substrates with high electrical resistivity and electron drift mobility are needed to fabricate high performance digital and analog microelectronic devices and circuits. Semi insulating n type gallium arsenide, henceforth termed SI GaAs, has been established worldwide as a preferred substrate material for such applications. 1. 2 The active layers needed for devices are generated either by epitaxy or by ion implantation. The quality of