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Electrostatic discharge (ESD) damages both products and reticles
SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
This Specification applies only to production equipment that act on substrates
These procedures are applicable to manufacturing
This Document applies only to oxygen gas delivered through pipelines
D07400 - SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates StdPbc-0820 Electrostatic discharge (ESD) damages bothPlastic films substrates for flexible displays change their dimensions by temperature and humidity. Also their dimensions will change by time after heat treatment, water treatment, etc. This Standard provides procedures for the measurement environmental condition to measure dimensions of plastic films substrates. This Standard provides guidance for measuring dimensions of plastic films substrates for electronic devices. Referenced SEMI Standards
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