E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers Revision:SEMI E1.9-0701E2 - Superseded The specification only describes information

The specification only describes information that is static in nature (i

These requirements are consistent with the requirements of SEMI M45

This pattern then appears as a mark on the individual wafers outside of the active area of solar cells after the brick is sliced

Test Method 1 describes how to:

procedures and notations for data acquisition and modeling exist

E00109 - SEMI E1.9 - Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers Revision:SEMI E1.9-0701E2 - Superseded The specification only describes informationNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. This includes both manual and auto transport use as well as high speed extraction of the wafers in processing