E05415 - SEMI E54.15 - SafetyBUS p用センサ／アクチュエータ・ネットワーク通信に関する仕様 Revision:SEMI E54.15-1107 - Superseded and unpacking and relocation of

and unpacking and relocation of semiconductor manufacturing equipment (SME) to the customer’s cleanroom manufacturing area

The purpose of this Specification is to enhance the capabilities of the parallel I/O interface defined in SEMI E23 in order to support improvements in the reliability and efficiency of carrier transfer

This Standard applies to only the intermediate container

1 — Specification for SECS-II Protocol for Object Services (OSS)

Where possible

E05415 - SEMI E54.15 - SafetyBUS p用センサ／アクチュエータ・ネットワーク通信に関する仕様 Revision:SEMI E54.15-1107 - Superseded and unpacking and relocation ofglobal Information & Control Committee200795global Audits and Reviews Subcommittee200710www. semi. org200711CD ROM2005220067 SEMI E54 SEMISANSafetuBUS p SafetyBUS pSafetyBUS p SafetyBUS pCANCANMAC SafetyBUS pSEMISAN SafetyBUS p SafetyBUS pSafetyBUS pOCSSANSANSEMI E54. 1 SafetyBUS p SafetyBUS pSafetyBUS pCDMSDM SEMISANSEMISDMSafetyBUS pSafetyBUS pSEMISANSafetyBUS p Referenced SEMI Standards SEMI E39 Object Services Standard: Concepts, Behavior, and