MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption StdTpc-Package Test Methods referencing the feature sizes contained

referencing the feature sizes contained in the International Roadmap for Devices and SystemsTM (IRDSTM)

3-0706 (first published)

buried layer

SEMI MF671-0312 (Reapproved 0718)

and aluminum on silicon

MF139100 - SEMI MF1391 - Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption StdTpc-Package Test Methods referencing the feature sizes containedThis reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon. Because carbon may also reside in interstitial lattice positions when in concentrations near the solid solubility limit, the results of this Test Method may not be a measure of the total carbon concentration at such concentrations. The useful range of carbon concentration measurable by this Test Method is from the maximum amount of