D02300 - SEMI D23 - Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment Revision:SEMI D23-0999 - Inactive all documents cited shall be

all documents cited shall be the latest published versions

Due to the migration to large substrate sizes in FPD production

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SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI D44 — Specification for Reference Position of Single Substrate for Handing Off On Tool

D02300 - SEMI D23 - Guide for Cost of Equipment Ownership (CEO) Calculation for FPD Equipment Revision:SEMI D23-0999 - Inactive all documents cited shall beThis guide was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the Japanese Flat Panel Display Equipment Committee. Current edition approved by the Japanese Regional Standards Committee on June 1, 1999. Initially available on SEMI OnLine August 1999; to be published September 1999. The purpose of this document is to provide a standard, simple CEO calculation method for evaluating FPD