E19700 - SEMI E197 - Specification for Large Tray Stack FOUP (LTSF) Revision:SEMI E197-0226 (Preliminary) - Current 4 This Practice supports requirements

4  This Practice supports requirements listed in SEMI M52

有効な通信性能を達成するための，標準的なメッセージの対話シーケンス

SEMI F3-94 (technical revision)

ある動作を実行する時に，SECS-IIが複数の可能な方法を提供する場合，その動作を完遂するための一貫した，ただ一つの方法

Xylene (o-

E19700 - SEMI E197 - Specification for Large Tray Stack FOUP (LTSF) Revision:SEMI E197-0226 (Preliminary) - Current 4 This Practice supports requirementsNOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from