F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdTpc-Terminology This will facilitate comparison of

This will facilitate comparison of test results between laboratories which support research and development activities or monitor or qualify PV silicon materials for purchase

本測定方法は，

there could be other applicable chemicals

本スタンダードは，global Information & Control Committeeで技術的に承認されている。現版は2007年12月20日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年2月にwww

SEMI E5-0707 (technical revision)

F11500 - SEMI F115 - Test Method for the Determination of Metallic Elements Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdTpc-Terminology This will facilitate comparison ofThis Document defines a test method for determining metallic elements present on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination