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Maintenance
org in March 2006
2公分）。
mass flow controllers (MFCs)
org in May 2016
C00348 - SEMI C3.48 - Standard for Nitrogen (N2), Bulk Liquid, 99.9994% Quality Revision:SEMI C3.48-0200 (Withdrawn 0303) - Replaced MaintenanceThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 1999. Available at www. semi. org in February 2000; originally published in 1993; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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