G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive Suitable analytical procedures are defined

Suitable analytical procedures are defined in each standard for each grade of liquid chemical such that their sensitivity meets the requirements of each of the respective grades of liquid chemicals

This Guide describes procedures for measuring filter particle retention while using UPW as the test media

Execute triggered skill maintenance jobs

SEMI MF1618-1110 (Reapproved 0322)

orgで入手可能となる。初版は2003年3月発行，前版は2008年11月に発行された。

G00600 - SEMI G6 - Test Method for Seal Ring Flatness Revision:SEMI G6-89 - Inactive Suitable analytical procedures are definedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification covers the method for determining the maximum deviation between the seal ring and a reference plane defined by three fixed points on the seal ring. This method will not work on parts smaller than 0. 330