M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdPbc-0522 This Guide is intended for

This Guide is intended for use in the exchange of silicon wafers and is not intended for process development where a wider range of options and data reporting formats may be appropriate

キャリアIDリーダ／ライタインタフェーススタンダードは上位コントローラを持っている包括的なキャリアIDリーダ／ライタインタフェースに関する機能的な要求条件を扱う。

orgで入手可能になり，2003年7月発行に至る。初版は1995年発行。

Wafer parameters as defined by SEMI M1

The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high-density integrated circuits on 450 mm diameter single crystal silicon wafers

M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdPbc-0522 This Guide is intended forglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM200311 11 P TP T Referenced SEMI Standards SEMI E35 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment SEMI E89 Guide for Measurement System Analysis (MSA) SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers S EMI M59 Terminology for Silicon Technology