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• To provide a measurable level of data quality to ensure quality of service and/or quality of performance of applications used by equipment suppliers
This standard falls under the general specification
Originally published June 1997
SEMI MF42-1105 (technical revision)
8-0698 (Reapproved 0615)
E14600 - SEMI E146 - Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers Revision:SEMI E146-0306 - Inactive • To provide a measurableNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard defines a test method for the determination of particulate contamination from minienvironments used for storage and transport of silicon wafers in semiconductor manufacturing. The particulate contamination
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