F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers It may be used as

It may be used as a basis for establishing performance criteria for purchases of new high purity water (HPW) equipment

Chemical precursors for ALD applications

SEMI E77-1104 (Reapproved 0815)

SEMI C28-0699 (first published - replaces SEMI C1

本テスト方法は，ASTM G150の改作である。この改作版は，配管などのガス供給システムのコンポーネントから切り出した接液表面部や試験片について，テストの実行方法を記載する。これは，水溶液浸漬法である。

F12200 - SEMI F122 - Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling StdTpc-Mass Flow Controllers It may be used as1 Purpose 1. 1 This Guide suggests formats for the facilities data package (FDP) typically required for the installation of manufacturing equipment in a facility. The data and formats suggested by this Guide complement other SEMI Standards (e. g., SEMI E6), and include the utility requirements and connections information needed for installing manufacturing equipment (including support equipment) and connecting that equipment to the facility and