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previously published October 2011
These methods are applicable to manufacturing
SEMI M45 — Specification for 300 mm Wafer Shipping System
SEMI D42-0308 (technical revision)
本仕様におけるマーキングシンボルは，従来の
C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality Revision:SEMI C66-0317 - Inactive previously published October 2011This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published February 2008. The purpose of this Document is to provide a guide for trimethylaluminum (TMAl) used in the semiconductor industry. The scope of this Document covers a
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