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在應用「SEMI S系列」文件進行評估有關公司時，本安全基準提供評估公司和評估人員應提供之最低限度的資訊。
which can make applicability of the standards more widely
as well as the ordering information for the polished substrates and starting wafers used to prepare epitaxial
and review tools
orgで入手可能となる。初版は2009年3月発行，前版は2009年7月発行。
D01700 - SEMI D17 - FPDガラス基板搬送用カセットの機械的仕様 StdPbc-0914 在應用「SEMI S系列」文件進行評估有關公司時，本安全基準提供評估公司和評估人員應提供之最低限度的資訊。Global Flat Panel Display Equipment CommitteeNorth American Flat Panel Display Committee19991215North American Regional Standards Committee20001SEMI On Line2000219989 FPD SEMI D18 Referenced SEMI Standards SEMI D18 Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates SEMI E15 Specification for Tool Load Port
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