E04100 - SEMI E41 - Exception Management (EM) Standard StdPbc-0326 For certain applications or specific

For certain applications or specific chemicals

SEMI E128-0414 (Reapproved 0224)

This Specification defines a common approach for gathering and combining data to support the reduction of cycle time through the identification and elimination of product time waste in the factory life cycle of a product unit

and Iron on Silicon and EPI Substrates by Secondary Ion Mass Spectrometry

and maintainability (RAM) goals based on the metrics defined in SEMI E10

E04100 - SEMI E41 - Exception Management (EM) Standard StdPbc-0326 For certain applications or specificInteractive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the